MICROWAVE PLASMA GENERATOR,申请号JP19920357210-传众专利搜索

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发明名称	MICROWAVE PLASMA GENERATOR
摘要
申请公布号	JPH06188095(A)	申请公布日期	1994.07.08
申请号	JP19920357210	申请日期	1992.12.21
申请人	NIPPON STEEL CORP	发明人	IKEDA HIDEHIKO
分类号	C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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