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发明名称
MANUFACTURE OF BLOCK-SHAPED SUPORT
摘要
申请公布号
JPH06188525(A)
申请公布日期
1994.07.08
申请号
JP19930221035
申请日期
1993.09.06
申请人
发明人
分类号
H01L23/36;H01L25/16;H01L33/62;H01L33/64;H01S5/00;H01S5/02;(IPC1-7):H01S3/18
主分类号
H01L23/36
代理机构
代理人
主权项
地址
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