Verfahren zur hydrophilierenden und/oder Kittreste entfernenden Oberflächenbehandlung von Siliciumscheiben.,申请号DE19883889858-传众专利搜索

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发明名称	Verfahren zur hydrophilierenden und/oder Kittreste entfernenden Oberflächenbehandlung von Siliciumscheiben.
摘要
申请公布号	DE3889858(D1)	申请公布日期	1994.07.07
申请号	DE19883889858	申请日期	1988.11.10
申请人	WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH, 84489 BURGHAUSEN	发明人	BRUNNER, ROLAND, D-8399 STUBENBERG;BAUER-MAYER, SUSANNE, DR. DIPL.-CHEM., D-8263 BURGHAUSEN;GRIESSHAMMER, RUDOLF, DR. DIPL.-CHEM., D-8262 ALTOETTING;KIRSCHNER, HELMUT, ING. GRAD., D-8261 EMMERTING
分类号	H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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