发明名称 USING A LEWIS BASE TO CONTROL MOLECULAR WEIGHT OF NOVOLAK RESINS
摘要 <p>The present invention provides methods for producing water insoluble, aqueous alkali soluble novolak resins having a precise and consistent molecular weight, by adjusting the concentration of Lewis base. A method is also provided for producing photoresist composition from such novolak resins and for producing semiconductor devices using such photoresist compositions.</p>
申请公布号 WO1994014862(A1) 申请公布日期 1994.07.07
申请号 US1993012403 申请日期 1993.12.20
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