A high performance projector (1) generates incoherent UV radiation in a wavelength range from 60 nm to 32 nm. High performance projectors (1) of this kind have an inner electrode (4) and an outer electrode (5). The outer electrode is arranged on the outer surface of the discharge chamber (3). In order to avoid darkening of the UV radiation leaving the discharge chamber, a plasma or an electrid field which influences the free charge carriers on the outer surface is generated around the outer surface of the discharge chamber. The charge may thus be transported to the earthed delimiting surface (2F) of the vacuum chamber (2).
申请公布号
WO9415354(A1)
申请公布日期
1994.07.07
申请号
WO1993EP03290
申请日期
1993.11.24
申请人
HERAEUS NOBLELIGHT GMBH;WEBER, ROGER;BRENDEL, THOMAS