| 发明名称 |
PHOTODEFINEABLE POLYMERS CONTAINING PERFLUOROCYCLOBUTANE GROUPS |
| 摘要 |
A polymer has at least one photoactive site and more than one perfluorocyclobutane group. New monomers containing photoactive sites or photoactive precursors and at least one perfluorovinyl group are useful for making such polymers. Processes of making such polymers and the monomers from which they are made are disclosed. The polymers are useful in coatings, in coating, photoresists, and other photoactive applications.
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| 申请公布号 |
CA2151151(A1) |
申请公布日期 |
1994.07.07 |
| 申请号 |
CA19932151151 |
申请日期 |
1993.12.01 |
| 申请人 |
DOW CHEMICAL COMPANY (THE) |
发明人 |
MOYER, ERIC S.;CLEMENT, KATHERINE S.;RICHEY, W. FRANK;BABB, DAVID A.;SORENSON, MARIUS W. |
| 分类号 |
G03F7/028;C07C43/225;C07C43/23;C07C45/65;C07C45/70;C07C45/71;C07C45/74;C07C47/277;C07C47/575;C07C49/255;C07C49/753;C07C49/84;C07C50/32;C07C59/68;C07C59/90;C07C65/28;C07C65/40;C07C205/35;C07C205/45;C07C225/22;C07C255/56;C07C265/12;C07D311/18;C08F2/48;C08F14/18;C08F16/14;C08F16/32;G03F7/004;G03F7/038;H01L21/027;(IPC1-7):C07C49/84;C07C43/20;C07C69/54;C07C217/80 |
主分类号 |
G03F7/028 |
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