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发明名称
Process for controlling the distribution of the evaporation rate of an electron beam.
摘要
申请公布号
EP0368037(B1)
申请公布日期
1994.07.06
申请号
EP19890119229
申请日期
1989.10.17
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
WEGMANN, URS, DIPL. ING. ETH;SIGNER, HANS;KOLLER, ALBERT, EL. ING. ETH
分类号
C23C14/30;C23C14/54;H01J37/302;H01J37/305;H01L21/027;H01L21/30;(IPC1-7):H01J37/302
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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