发明名称 METHOD OF FABRICATING NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE
摘要 An MOS transistor having an LDD structure is constructed in a first active region for a peripheral circuit in alignment with a first gate, by using as a mask a second active region for a memory cell. After forming a first interlayer insulating layer, a second gate having a floating gate and a control gate is formed in the second active region. A third insulating layer formed on the surface including the second gate is patterned to form a contact hole bounded by a sidewall of a side face of the second gate. <IMAGE>
申请公布号 EP0595250(A3) 申请公布日期 1994.07.06
申请号 EP19930117303 申请日期 1993.10.26
申请人 NEC CORPORATION 发明人 INOUE, TATSURO
分类号 H01L21/8247;H01L27/105 主分类号 H01L21/8247
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