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发明名称
BASE BODY TREATMENT DEVICE AND DEPOSITED FILM FORMING DEVICE
摘要
申请公布号
JPH06184757(A)
申请公布日期
1994.07.05
申请号
JP19920343758
申请日期
1992.12.24
申请人
CANON INC
发明人
KOIKE ATSUSHI
分类号
C23C16/50;C23C16/511;C23F4/00;H01L21/205;H05H1/46;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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