Bridge for connecting cores in a manufacturing equipment of polycrystal silicon

摘要

PCT No. PCT/JP90/01373 Sec. 371 Date Apr. 27, 1992 Sec. 102(e) Date Apr. 27, 1992 PCT Filed Oct. 25, 1990 PCT Pub. No. WO91/06507 PCT Pub. Date May 16, 1991.In a equipment for manufacturing polycrystal silicon by depositing it on filament cores electrically heated, by means of thermal decomposition of monosilane gas, a bridge for connecting said filament cores is constituted by tantalum, molybdenum, tungsten or zirconium. Preferably the sectional shape of the connection bridge may be of upturned triangle, tear droplet or rectangle.