Surface acoustic wave (SAW) chemical multi-sensor array

摘要

A sensor for chemical vapor detection using a surface acoustic wave (SAW) array that provides a means for simultaneously detecting several chemical agents. The sensor has a piezoelectric substrate and a bidirectional surface acoustic wave transducer on the substrate. Also on the substrate are several pairs of identical acoustic sensing and reference channels each on opposite sides of the transducer in a mirror image fashion. Each channel pair has a thin film capable of absorbing a chemical vapor to be monitored and a metallic surface acoustic wave grating reflector capable of receiving and reflecting surface acoustic waves through the thin film and back to the transducer. An acoustic absorber separates each channel. The reference channels are protected from ambient conditions while the sensing channels are exposed to such conditions. An RF signal is applied to the transducer causing the propagation of an acoustic signal into each of the sensing channels and reference channels. Output signals from the transducer are then detected. The array is preferably in a miniature configuration which is suitable for wearing on a person's wrist or arm.