发明名称 |
Measurement of gas leaks into gas lines of a plasma reactor |
摘要 |
A method for testing for gas leaks in plasma reactors and gas lines introducing gas into the reactor, includes: measuring the intensity of the plasma reactor light emission; introducing known increments of a test gas into the reactor; measuring the intensity of the plasma reactor light emission after each introduction of an increment of test gas into the reactor; producing a curve resulting from the intensity readings vs increments of introduced gas; and performing a regression analysis on the curve to determine a value of gas at which the intensity is equal to zero, which value of gas is the amount of gas that has been leaked into the reactor.
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申请公布号 |
US5326975(A) |
申请公布日期 |
1994.07.05 |
申请号 |
US19930076031 |
申请日期 |
1993.06.15 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BARNA, GABRIEL G. |
分类号 |
G01N21/73;C23C14/00;G01N21/71;H01L21/302;H01L21/3065;(IPC1-7):G01N21/73 |
主分类号 |
G01N21/73 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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