发明名称 Semiconductor device with hydrogen ion intercepting layer
摘要 A thin first insulating oxide film is formed on a semiconductor substrate. A thick second insulating oxide film is formed on a semiconductor substrate. A first polysilicon resistance film is formed on the first insulating oxide film. A second polysilicon resistance film is formed on the second insulating oxide film. An insulating protection film, which contains a large amount of hydrogen ion and covers the first polysilicon resistance film, second polysilicon resistance film, first electrode and second electrode, is formed on the semiconductor substrate. A hydrogen ion intercepting film, which prevents passage of hydrogen ion, is interposed between the first insulating oxide film and the first polysilicon resistance film and between the second insulating oxide film and second polysilicon resistance film.
申请公布号 US5327224(A) 申请公布日期 1994.07.05
申请号 US19920960650 申请日期 1992.10.14
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 IKEGAMI, MASAAKI;HIGUCHI, TETSUO
分类号 H01L27/04;H01L21/02;H01L21/822;H01L21/8222;H01L27/06;H01L27/08;(IPC1-7):H01L29/72 主分类号 H01L27/04
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