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发明名称
System und Methode zur Ablagerung von dünnen Filmen im Vakuum.
摘要
申请公布号
DE69009078(D1)
申请公布日期
1994.06.30
申请号
DE19906009078
申请日期
1990.02.08
申请人
OPTICAL COATING LABORATORY INC., SANTA ROSA, CALIF.
发明人
TEMPLE, MICHAEL D., SANTA ROSA, CALIFORNIA 95401;SEDDON, RICHARD I., SANTA ROSA, CALIFORNIA 95404
分类号
C23C14/30;C23C14/32;(IPC1-7):C23C14/46
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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