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发明名称
Verfahren und Vorrichtung zur interferometrischen Absolutprüfung von Planflächen.
摘要
申请公布号
DE59101691(D1)
申请公布日期
1994.06.30
申请号
DE19915001691
申请日期
1991.01.19
申请人
FA. CARL ZEISS, 73447 OBERKOCHEN
发明人
KUECHEL, MICHAEL, DR., W-7082 OBERKOCHEN
分类号
G01B11/30;(IPC1-7):G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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