| 摘要 |
The method according to the invention is a method of frequency fine-tuning of a piezoelectric device (1) comprising at least one resonant function formed by two metallised electrodes (4, 5), each placed opposite a different face of a plate (2) of piezoelectric material. It consists in: - arranging the plate equipped with over-metallised electrodes in fine-tuning position in proximity to a source of ions, - exposing the plate to a flow of ions produced by the source, the flow of ions attacking the metal, - measuring the resonant frequency of the resonant function while the sheet is in fine-tuning position, - bringing at least one electrode (4) exposed to the flow of ions to an adjustable polarisation potential, so as to control the speed of attack of the metal on the electrode (4). Application: frequency fine-tuning of piezoelectric resonators. <IMAGE> |
