VERTICAL HEAT TREATMENT APPARATUS AND HEAT INSULATING MATERIAL.

摘要

A vertical heat treatment apparatus which has a heat insulating body having heat insulating property, high allowable over-load and pressure resistance sufficient to cope with the increase in the diameter of a substrate and with the treatment of many substrates, and being suitable especially to heat treatment apparatus for semiconductor and TFT substrates. In the apparatus, especially, on the top of a heat insulating table (40), a jig (4) for holding substrates is provided, and in the lower space of the table (40) a heat insulating material (50) made of a porous material is stored. This vertical heat treatment apparatus is characterized in that a space (B) for storing the heat insulating material is gastightly isolated from a space (A) for storing substrates by the heat insulating table (40), and the space (B) can be ventilated, decompressed or compressed via a base (70) supporting the heat insulating table (40), or via the part where a flange part (41) of the heat insulating table contacts with the base (70).