| 发明名称 |
Protection layer for electroactive passivation layers. |
| 摘要 |
<p>Hard, mechanically and chemically stable protective layers for electroactive passivation layers of semiconductor components, which also act as diffusion barriers against moisture and ions, comprise a thin layer of amorphous, hydrogenated carbon.</p> |
| 申请公布号 |
EP0381110(B1) |
申请公布日期 |
1994.06.29 |
| 申请号 |
EP19900101717 |
申请日期 |
1990.01.29 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BIRKLE, SIEGFRIED, DR.;KAMMERMAIER, JOHANN, DR.;SCHMIDT, GERHARD, DR.;SCHULTE, ROLF |
| 分类号 |
H01L29/78;C23C16/26;H01L21/312;H01L21/56;H01L23/29;(IPC1-7):C23C16/26 |
主分类号 |
H01L29/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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