VACUUM-CHUCK ASCERTAINING APPARATUS AND VACUUM-CHUCK ASCERTAINING PRESSURE LEVEL SETTING METHOD.

摘要

A vacuum-chuck ascertaining apparatus provided with a vacuum-chuck ascertaining pressure switch in a passage for communication of working machine, such as a vacuum-chuck pad with a vacuum supply source, and a variable restricting valve and a pressure control valve on the upstream side of this pressure switch. Therefore, when a pressure detecting operation is carried out with the pressure switch, the difference between the pressures at the restricting valve during the vacuum chucking of a work and during the nonvacuum chucking thereof becomes large, and, moreover, the influence of variation of pressure from the vacuum supply source is eliminated by the pressure control valve, so that a pressure level at which the vacuum-chuck of a work can be ascertained can be set reliably. When pressure variation occurs due to the clog of a filter provided in the passage mentioned above, the vacuum-chuck ascertaining pressure level is changed accordingly by the vacuum-chuck ascertaining pressure level setting method. Accordingly, whether a work is chucked or not can be ascertained reliably.