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发明名称
MANUFACTURE OF SEMICONDUCTOR CHIP
摘要
申请公布号
JPH06181213(A)
申请公布日期
1994.06.28
申请号
JP19920353136
申请日期
1992.12.11
申请人
SHARP CORP
发明人
KUBO MASARU;MAEDA AKIYUKI
分类号
H01L21/322;H01L21/027;(IPC1-7):H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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