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发明名称
Electrode plate for plasma etching
摘要
A disc-shaped electrode plate body is made of high-purity glassy carbon and has a large number of very-small-diameter through holes each of which has a plurality of spherical recesses in its internal wall surface.
申请公布号
US5324411(A)
申请公布日期
1994.06.28
申请号
US19920946602
申请日期
1992.09.18
申请人
TOSHIBA CERAMICS CO., LTD.
发明人
ICHISHIMA, MASAHIKO;SASAKI, YASUMI;TOYA, EIICHI;KASAHARA, MASATOSHI;MAKITA, RITSUROU
分类号
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):H05H1/46
主分类号
H01L21/302
代理机构
代理人
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