WATER WASHING EQUIPMENT FOR SEMICONDUCTOR WAFER,申请号JP19920331571-传众专利搜索

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发明名称	WATER WASHING EQUIPMENT FOR SEMICONDUCTOR WAFER
摘要
申请公布号	JPH06181196(A)	申请公布日期	1994.06.28
申请号	JP19920331571	申请日期	1992.12.11
申请人	HITACHI LTD	发明人	MIYAGUCHI TAKASHI;KADOI YOSHIHARU
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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