FORMATION OF CONTACT HOLE,申请号JP19920331663-传众专利搜索

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发明名称	FORMATION OF CONTACT HOLE
摘要
申请公布号	JPH06181183(A)	申请公布日期	1994.06.28
申请号	JP19920331663	申请日期	1992.12.11
申请人	MITSUBISHI ELECTRIC CORP	发明人	OOUCHI SHIYUUICHIROU
分类号	H01L21/28;(IPC1-7):H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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