INTERATOMIC FORCE MICROSCOPE

摘要

PURPOSE:To provide an interatomic force microscope where the size of a sample is not limited, the load on a scanner is small, and a displacement detection system can be adjusted easily. CONSTITUTION:The lower edges of a tube scanner 12 and an outside fine-move element 16 are mounted on an interlocking member 14 and the upper edges of the outside fine-move element 16 and an inside fine-move element 20 are mounted on the interlocking member 18. A sensor mounting stand 22 is mounted at the lower edge of the inside fine-move element 20. A stage holder 26 is interlocked to a cylindrical member 24 by screws and a cantilever 28 and an O ring 30 are housed inside the stage holder 26 and the cylindrical member 24. The cantilever 32 is mounted at the lower edge of the cantilever stage 28 by screws ands a cantilever 34 is mounted on it. An optical fiber 36 is inserted into the insertion hole of the cantilever holder 32 and is fixed to the sensor mounting stand 22.