发明名称 JOINT
摘要 <p>PURPOSE:To provide a joint excellent in dielectric strength, mechanical strength, and thermal insulation properties. CONSTITUTION:In a joint for coupling an external refrigerant passage with a refrigerant containing section, a thermal insulation intermediate section 90 made of a highly dielectric material having low thermal conductivity is interposed between a coupling section 88 to be mounted on the containing section and a coupling section 92 to be coupled with the refrigerant passage. This structure enhances electrical and thermal insulation between the refrigerant containing section side and the refrigerant passage side.</p>
申请公布号 JPH06181186(A) 申请公布日期 1994.06.28
申请号 JP19920353046 申请日期 1992.12.11
申请人 TOKYO ELECTRON LTD 发明人 KOMINO MITSUAKI;UEDA YOICHI
分类号 H01L21/302;H01L21/3065;H01L21/68;H01L21/683;(IPC1-7):H01L21/302 主分类号 H01L21/302
代理机构 代理人
主权项
地址