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发明名称
LIQUID EVAPORATOR
摘要
申请公布号
JPH06181177(A)
申请公布日期
1994.06.28
申请号
JP19920082307
申请日期
1992.04.03
申请人
LEYBOLD AG
发明人
MANFUREETO ARUNORUTO;RAINAA GEGENWARUTO;SONIA NORU;YOHEN RITSUTAA;HERUMUUTO SHIYUTOORU
分类号
C23C14/22;C23C16/44;C23C16/448;C23C16/455;F22B3/02;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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