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发明名称
SURFACE OBSERVATION APPARATUS
摘要
申请公布号
JPH06180228(A)
申请公布日期
1994.06.28
申请号
JP19920352952
申请日期
1992.12.11
申请人
OLYMPUS OPTICAL CO LTD
发明人
NAKAMURA YASUSHI
分类号
G01B11/30;G01B21/30;G01Q10/04;G01Q60/24;G01Q60/50;H01J37/28;(IPC1-7):G01B21/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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