发明名称 RADIATION SENSITIVE ESTER SULFONATE AND USE THEREOF
摘要 PURPOSE: To obtain a radiation-sensitive recording material having high resolution and sensitivity for a wide spectral region. CONSTITUTION: A negative radiation-sensitive mixture containing the following components is prepared. The components are (a) a compd. which produces strong acid by exposure to active radiation, (b) a compd. having at least two groups which can be crosslinked by acid, and (c) a polymer binder which is insoluble water and soluble or at least swellable with an alkali soln. The compd. (a) is expressed by formula I or formula II which is an ester between sulfonic acid such as R-SO3 H or R'(-SO3 H)2 and 2,4-bis-trichloromethyl-6-(mono or dihydroxyphenyl)-1,3,5-triazine. In formulae I, R is a 1 to 10C alkyl group, etc., which may have substituents if required, and R' is a 1 to 10C alkylene group, etc., which may have substituents if required, and (n) is 1 or 2.
申请公布号 JPH06180502(A) 申请公布日期 1994.06.28
申请号 JP19920159773 申请日期 1992.06.18
申请人 HOECHST AG 发明人 GEORUKU PAUROUSUKI;HORUSUTO RESUHIERUTO;WARUTAA SHIYUPIISU;KURAUSUUIERUGEN PURUTSUIBIRA
分类号 G03F7/004;C07D251/24;C08L61/06;C08L61/28;C09D161/06;G03F7/00;G03F7/029;G03F7/038;H01L21/027;(IPC1-7):G03F7/029 主分类号 G03F7/004
代理机构 代理人
主权项
地址
您可能感兴趣的专利