| 摘要 |
PURPOSE:To irradiate a work with laser specified in energy level by a laser irradiation device by a method wherein the energy density of laser rays per unit area is measured, and the device is controlled in laser output so as to project laser constant in energy density. CONSTITUTION:Laser emitted from a laser source 51 is a few cm square in cross section at a projection aperture. The laser is formed into a prescribed shape 1cm square) with a beam forming means 63 so as to be, for instance, 1cm-square in cross section at a work 52. The energy density of laser shaped as prescribed is measured by a measuring means 64 and fed back to the laser source 51 for controlling it is output so as to keep laser constant in energy density, whereby the work 52 is irradiated with a certain amount of laser constant in energy density. By this setup, a work can be uniformly irradiated with laser constant in energy density per unit area. |
