| 摘要 |
PURPOSE:To obtain an optical drawing apparatus equipped with high resolving power by performing a zonal illumination without power loss and further to obtain the optical drawing apparatus for attaining higher resolution by performing a polarized illumination using S-polarized light simultaneously with the zonal illumination without power loss. CONSTITUTION:Light outgoing from a laser oscillator 11 diverges by a first conical mirror 16, converges again by a relay mirror 18, thereafter forms a zonal luminous flux by a second conical mirror 17, which is provided while being regulated in the manner of forming the zonal luminous flux, and converges on a substrate 15 by a condenser lens 14 to draw a circuit pattern in the substrate 15. Also, a polarization beam splitter is installed in place of the mirror 16 or 17 to perform a polarized illumination simultaneously with a zonal illumination and to perform pattern drawing. Thus, the zonal illumination and polarized illumination are performed without power loss so that a high resolution is obtained. |
