| 摘要 |
PURPOSE:To sharply restrain a photovoltaic element from deteriorating in characteristics due to light and vibrations by a method wherein an RF doped layer and an MW doped layer are arranged interposing an i-type layer between them, and the i-type is made to change smoothly in fluorine and hydrogen content in its thicknesswise directions. CONSTITUTION:A photovoltaic element is formed through such a manner that an MW n-conductivity type layer 102 is formed on a substrate 101 by an MWPCVD method, an RF n-conductivity type layer 103 is formed thereon by a PFPCVD method, furthermore an RF p-type layer 105 formed by an PFPCVD method and an MW p-type layer 106 formed by an MWPCVD method are formed thereon interposing between the layers 105, 106 a fluorine-containing i-type layer 104 formed by an MWPCVD method, and a transparent electrode 107 and a collecting electrode 108 are formed on the MW p-type layer 106. By this setup, a photovoltaic element of this constitution is very stable, hardly separated off, and can be remarkably restrained from deteriorating in characteristics due to light and vibrations even if it stands in an environment of high temperature and high humidity. |
