POSITIVE AND NEGATIVE CUSP TYPE ION SOURCE,申请号JP19920326526-传众专利搜索

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发明名称	POSITIVE AND NEGATIVE CUSP TYPE ION SOURCE
摘要
申请公布号	JPH06176726(A)	申请公布日期	1994.06.24
申请号	JP19920326526	申请日期	1992.12.07
申请人	MITSUBISHI HEAVY IND LTD;KOUENERUGII BUTSURIGAKU KENKYU SHOCHO	发明人	MORI YOSHIHARU;TAKAGI AKIRA;KAKIGI MUTSUO;KOBAYASHI HITOSHI;YAMASU KAZUE
分类号	H01J27/14;H01J37/08;(IPC1-7):H01J37/08	主分类号	H01J27/14
代理机构		代理人
主权项
地址

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