| 摘要 |
PURPOSE: To obtain a production method satisfying the changing demand for gaseous nitrogen of a plurality of impurities, including an intermediate purity on the order of ppm and at least one kind of high purity which is of the order of ppb or 100 ppb. CONSTITUTION: A column 4 for production of nitrogen by the rectification of air, adapted to produce high purity nitrogen at its head, is associated with an external source 5 of medium purity liquid nitrogen fitted with a device 6 for the liquid phase adsorption of carbon monoxide and a high purity liquid nitrogen storage tank 8. The column produces medium purity gaseous nitrogen and high purity gaseous nitrogen by direct withdrawal 11, 12, optionally supplemented by vaporization 7, 9 of liquid nitrogen. It is utilized in concurrent production of medium purity nitrogen and high purity nitrogen for electronic industry.
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