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发明名称
FORMATION OF WIRING
摘要
申请公布号
JPH06177085(A)
申请公布日期
1994.06.24
申请号
JP19920329103
申请日期
1992.12.09
申请人
HITACHI LTD;HITACHI MICOM SYST:KK
发明人
MATSUZAKI SAKAE;NAKADA HIROYUKI
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;(IPC1-7):H01L21/302;H01L21/320
主分类号
C23F4/00
代理机构
代理人
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地址
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