发明名称 BUMP FORMING MACHINE
摘要 PURPOSE:To provide a machine for forming a small bump on the pad of a chip easily at low cost. CONSTITUTION:A sheet 14 embedded with multiple conductive pieces 15 is held horizontally and a chip 6 is disposed below the sheet 14. A presser 26 held on a horn 25 is disposed above the sheet 14 and then the presser 26 is lowered to press the conductive pieces against the pads 7 on the chip 6 thus bonding the conductive pieces thereto. This machine allows easy formation of a small bump on the pad 7 and since the bump can be formed using a machine similar to a wire bonder, facility cost is reduced resulting in low cost formation of a bump.
申请公布号 JPH06177137(A) 申请公布日期 1994.06.24
申请号 JP19920323917 申请日期 1992.12.03
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HAJI HIROSHI
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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