MANUFACTURE OF DIELECTRIC THIN FILM,申请号JP19920330269-传众专利搜索

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发明名称	MANUFACTURE OF DIELECTRIC THIN FILM
摘要
申请公布号	JPH06177041(A)	申请公布日期	1994.06.24
申请号	JP19920330269	申请日期	1992.12.10
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	KOMAKI KAZUKI;KAMATA TAKESHI;HAYASHI SHIGENORI;HIRAO TAKASHI
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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