| 摘要 |
PURPOSE:To provide a substrate transfer device which can easily maintain the high-precision abutting condition of each grasping member with respect to a substrate to surely grasp the substrate with each grasping member used for grasping the substrate and at the same time can relax force applied to the substrate when it is grasped. CONSTITUTION:Each grasping member 148, 149 provided for grasping a substrate L/F is so constituted as to linearly move. Even when the thickness of the changes, the claw parts 148a, 149a of each grasping member are worn or the like and then the grasping member is replaced, so that some change is brought about in the length between new old grasping members, the high-precision condition of the grasping member with respect to the substrate is not damaged but can be easily maintained. Also, driving force for each grasping member is provided through a displacement member, such as cam member 160. Therefore, the shape of the displacement is suitably set, thereby being able to control the operating speed of each grasping member and relax impact force applied to the substrate from the grasping member. |
