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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06177069(A)
申请公布日期
1994.06.24
申请号
JP19920323340
申请日期
1992.12.02
申请人
TOSHIBA CORP
发明人
HAGIWARA KENICHIRO
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/28;H01L21/90
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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