| 摘要 |
<p>PURPOSE:To provide the manufacturing method of a piezoelectric bimorph, which can manufacture the highly reliable piezoelectric bimorph in excellent productivity without the occurrence of cracks and flaws so that the life of a cutting grinding wheel is long and the cutting speed is quick. CONSTITUTION:A metal plate 3 and a piezoelectric element 1 are bonded, and a bonded body 9 is constituted. The bonded body is cut into the width of a product, and a piezoelectric bimorph 4 is obtained. In this manufacturing method of bimorph, slits 10 having the width of a cutting grinding wheel or the width that is slightly wider than the wheel are machined beforehand in a flank 8 at a cutting interval, i.e., the interval of the sum of the width of the product and the width of the cutting wheel. The thin plate of the piezoelectric ceramics, which is a raw plate 7 of a piezoelectric element and machined as an electrode, is bonded to the blank 8, wherein the slits 10 are machined. Thus, the bonded body 9 of the raw material of the piezoelectric bimorph is formed. The bonded body is cut into the specified width, and the product is obtained in this manufacturing method.</p> |
