SEMICONDUCTOR DEVICE FOR EVALUATING RELIABILITY AND PRODUCT LSI AND WAFER WITH BUILT-IN EVALUATION PATTERN FOR EVALUATING RELIABILITY,申请号JP19920326624-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE FOR EVALUATING RELIABILITY AND PRODUCT LSI AND WAFER WITH BUILT-IN EVALUATION PATTERN FOR EVALUATING RELIABILITY
摘要
申请公布号	JPH06177221(A)	申请公布日期	1994.06.24
申请号	JP19920326624	申请日期	1992.12.07
申请人	FUJITSU LTD	发明人	KUROKI YUICHIRO
分类号	G01R31/26;H01L21/3205;H01L21/326;H01L21/66;H01L23/52;(IPC1-7):H01L21/66	主分类号	G01R31/26
代理机构		代理人
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地址

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