发明名称 SEMICONDUCTOR MEMORY DEVICE AND FABRICATING METHOD THEREOF
摘要 <p>A MOS transistor included in a peripheral circuit of a DRAM has conductive layers for interconnection on respective surfaces of a pair of source.drain regions. The source.drain interconnection layers are electrically connected to the source.drain regions through the conductive layers. One of the pair of conductive layers is formed in the same step as a bit line of a memory cell, by the same material as the bit line. The other one of the pair of conductive layers is formed in the same step as a storage node of a capacitor of the memory cell, by using the same material as the storage node. The pair of conductive layers prevent direct connection between the source.drain interconnection layer and the source.drain regions, so that reduction in size of the source.drain regions can be realized.</p>
申请公布号 KR940005889(B1) 申请公布日期 1994.06.24
申请号 KR19910003474 申请日期 1991.03.04
申请人 MITSUBISHI ELECTRIC CORP. 发明人 ARIMA, HIDEAKI
分类号 H01L27/10;H01L21/8242;H01L27/105;H01L27/108;(IPC1-7):H01L27/108 主分类号 H01L27/10
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