| 摘要 |
PURPOSE:To provide the semiconductor inspector which can prevent the abnormal current of a device to be measured and can prevent the element destruction at the time of reference OFF. CONSTITUTION:Concerning the reference OFF of the semiconductor inspector defining a logic integrated circuit device provided with a self-diagnostic function as the device to be measured, the high level of test input signals TI11-TI1k or TIj1-Tljk at the high level when ending a test are first reduced to the lower limit value of an input high level voltage, namely, to a potential V1 close to +2V when a power supply voltage VCC is at a specified value, namely, at +5V, and the potential of the power supply voltage VCC is reduced to this potential V1 later. Next, the high level of the test input signal is reduced to the lower limit value of the input high level voltage, namely, to a potential V2 close to +1.5V when the power supply voltage VC is at the potential V1, and the potential of the power supply voltage VCC is reduced to this potential V2 later. Then, the absolute values of the power supply voltage VCC and the test input signal are stepwise and mutually reduced while repeating the similar processing afterwards. |
