DEVICE FOR TRANSFERRING SEMICONDUCTOR WAFERS,申请号KR19860002754-传众专利搜索

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发明名称	DEVICE FOR TRANSFERRING SEMICONDUCTOR WAFERS
摘要
申请公布号	KR940005702(B1)	申请公布日期	1994.06.23
申请号	KR19860002754	申请日期	1986.04.11
申请人	SONY CORP.	发明人	SATO, RYOSUKE
分类号	B25J15/00;B65D85/38;H01L21/67;H01L21/673;H01L21/68;H01L21/687;(IPC1-7):H01L21/00	主分类号	B25J15/00
代理机构		代理人
主权项
地址

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