,申请号JP19890148067-传众专利搜索

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发明名称
摘要
申请公布号	JPH0648714(B2)	申请公布日期	1994.06.22
申请号	JP19890148067	申请日期	1989.06.09
申请人		发明人
分类号	C23F4/04;H01C17/26;H01L27/01;H05K1/16;(IPC1-7):H01L27/01	主分类号	C23F4/04
代理机构		代理人
主权项
地址

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