发明名称 POLISHING METHOD USING ULTRAVIOLET RAY HARDENING TYPE TAPE
摘要 PURPOSE:To provide a method for polishing a material to be polished such as optical parts like a bismuth substitution iron garnet crystal used for a light isolator, etc., a ferrite base plate for a microwave integrated circuit, a magnetic garnet for static magnetic wave element by using an ultraviolet hardening type tape. CONSTITUTION:In a polishing process, a work 1 is bonded on a plate 3 through which ultraviolet ray can pass, by using a ultraviolet ray hardening type double- sided tape 2, and after the polishing, the work 1 is irradiated by ultraviolet ray and separated from an ultraviolet ray hardening type double-sided tape 2.
申请公布号 JPH06170727(A) 申请公布日期 1994.06.21
申请号 JP19920345185 申请日期 1992.12.01
申请人 SHIN ETSU CHEM CO LTD 发明人 MOGI OSAMU;YAMADA ATSUSHI;RIYUUOU TOSHIHIKO
分类号 B24B37/04;B24B41/06;(IPC1-7):B24B37/04 主分类号 B24B37/04
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