发明名称 Dry developable photoresist compositions and method for use thereof
摘要 Dry developable top surface imageable photoresist compositions which comprise, in admixture, a film-forming aromatic polymer resin activated to electrophilic substitution, an acid catalyzable agent capable of being inserted into the aromatic polymer resin, and a radiation degradable acid generating compound and processes for generating positive tone resist images on substrates therewith.
申请公布号 US5322765(A) 申请公布日期 1994.06.21
申请号 US19910796527 申请日期 1991.11.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CLECAK, NICHOLAS J.;CONLEY, WILLARD E.;KWONG, RANEE W.-L.;LINEHAN, LEO L.;MACDONALD, SCOTT A.;SACHDEV, HARBANS S.;SCHLOSSER, HUBERT;WILLSON, CARLTON G.
分类号 G03F7/004;G03F7/029;G03F7/038;G03F7/039;G03F7/26;G03F7/36;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):G03C1/72;G03F7/00 主分类号 G03F7/004
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