PRODUCTION OF ALUMINUM NITRIDE SINTERED COMPACT

摘要

PURPOSE:To obtain an AlN sintered compact having a high thermal conductivity at a remarkably reduced production cost by using fine AlN powder having >=4m<2>/g specific surface area and sintering the powder at a temperature as low as <=170 deg.C. CONSTITUTION:A rear earth element and an alkali earth metallic oxide alone or in combination in an amount of 0.5-7wt.% based on AlN powder having >=4m<2>/g specific surface area is added thereto and an organic binder is further added to provide a sintering precursor. The resultant precursor is subsequently degreased so as to afford 20-70wt.% organic binder expressed in terms of residual carbon content based on the oxygen content in the AlN powder. The degreased precursor is then sintered at <=1700 deg.C temperature in a nonoxidizing atmosphere.