发明名称 |
METHOD OF MAKING PATTERN |
摘要 |
The method comprises the steps of forming an insulating layer in a predetermined thickness on a substrate, removing the insulating layer to a predetermined thickness using a mask having a polarity opposite to that of a conductive layer pattern to form a groove, depositing a conductive layer on the insulating layer, and forming a conductive layer pattern on the groove using a conductive layer pattern mask, thereby simplifying processes. |
申请公布号 |
KR940005609(B1) |
申请公布日期 |
1994.06.21 |
申请号 |
KR19910011474 |
申请日期 |
1991.07.08 |
申请人 |
HYUNDAI ELECTRONICS CO., LTD. |
发明人 |
SON, KWANG - SHIK;YANG, JONG - YOL;SONG, JIN - MO |
分类号 |
H01L21/027;G03F1/00;(IPC1-7):G03F1/14 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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