发明名称 METHOD OF MAKING PATTERN
摘要 The method comprises the steps of forming an insulating layer in a predetermined thickness on a substrate, removing the insulating layer to a predetermined thickness using a mask having a polarity opposite to that of a conductive layer pattern to form a groove, depositing a conductive layer on the insulating layer, and forming a conductive layer pattern on the groove using a conductive layer pattern mask, thereby simplifying processes.
申请公布号 KR940005609(B1) 申请公布日期 1994.06.21
申请号 KR19910011474 申请日期 1991.07.08
申请人 HYUNDAI ELECTRONICS CO., LTD. 发明人 SON, KWANG - SHIK;YANG, JONG - YOL;SONG, JIN - MO
分类号 H01L21/027;G03F1/00;(IPC1-7):G03F1/14 主分类号 H01L21/027
代理机构 代理人
主权项
地址