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发明名称
VACUUM DEPOSITION DEVICE FOR CONTINUOUSLY FORMING FILM
摘要
申请公布号
JPH06173001(A)
申请公布日期
1994.06.21
申请号
JP19920350676
申请日期
1992.12.04
申请人
CANON INC;SHIN MEIWA IND CO LTD
发明人
OKADA HIDEO;SHIBAYAMA KAZUHIKO;SAWAMURA MITSUHARU;NUMATA TAKAHIRO;YAMABE SHINICHI;NAKAMURA YOSHIHISA;HAJI YASUHIRO
分类号
C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
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