| 摘要 |
<p>PURPOSE:To obtain a very small flow channel element capable of supplying sufficient resolving power without requiring a filler, comprising a very small element which can separate a liquid by passing the liquid through the element wherein part of the surface of a semiconductor base is made into an anode to form a porous flow channel. CONSTITUTION:Pyrex glass 10 is put in a solution of NaOH, two electrodes are inserted into the solution, an electric voltage is applied to the electrodes, the negative electrode is brought into contact with the Pyrex glass 10 to form holes having 0.5mm diameter at two spots. The holes are made into an inlet 11 and an outlet 12, respectively to give Pyrex glass 10 having formed the inlet 11 and the outlet 12 of fluid. On the other hand, the surface of a p-type single crystal silicon base 20 having about 0.001-100OMEGA resistivity is masked while leaving a surface part corresponding to a flow channel to be prepared, the base is immersed in a solution of hydrofluoric acid, is provided with a cathode, an anode is connected to the back of the silicon base 20, an electric current is sent to the electrodes and an anode is formed to form a porous flow channel 21. The silicon base 20 is laminated to the Pyrex glass 10 to give a very small flow channel 30 through which a fluid can be passed and separated.</p> |
